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Influence of thickness and substrate on the hardness and deformation of TiN films

✍ Scribed by M. Wittling; A. Bendavid; P.J. Martin; M.V. Swain

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
598 KB
Volume
270
Category
Article
ISSN
0040-6090

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## Abstract Transparent Zinc Oxide (ZnO) thin films have been grown on Si (100) and Sapphire (0001) substrates by RF magnetron sputtering for different growth time intervals (10, 30 and 60 min) to study the substrate and thickness effects. All the films have been grown at a substrate temperature of