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Influence of Thermal Treatment on Optical and Structure Properties of Europium-Doped SiO2–HfO2 Glasses

✍ Scribed by Chaofeng Zhu; André Monteil; Mohamed EI-Jouad; Nathalie Gaumer; Stephane Chaussedent


Book ID
109262767
Publisher
John Wiley and Sons
Year
2010
Tongue
English
Weight
401 KB
Volume
93
Category
Article
ISSN
0002-7820

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HfO 2 thin films have been deposited on Si substrate by radio frequency reactive magnetron sputtering. The optical and structural properties of HfO 2 thin films in relation to rapid thermal annealing (RTA) temperatures are investigated by spectroscopic ellipsometry (SE), X-ray diffraction (XRD) and