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Influence of thermal phenomena on machining

✍ Scribed by V. G. Yakukhin; A. V. Ponomarev; A. D. Maksimov

Book ID
111509695
Publisher
Allerton Press, Inc.
Year
2009
Tongue
English
Weight
160 KB
Volume
29
Category
Article
ISSN
1068-798X

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## Influence of Mechanical Stress on Thermal Oxidation Phenomena of Silicon Some phenomena of the thermal wet oxidation of polycrystalline silicon structures are discussed in connection with the geometry of this structures and mechanical stress present in the growing oxide layer. A model is presen