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Influence of thermal aging on TiNx thin film resistors

✍ Scribed by Grażyna Beensh-Marchwicka; Tadeusz Berlicki


Book ID
107862643
Publisher
Elsevier Science
Year
1979
Tongue
English
Weight
158 KB
Volume
62
Category
Article
ISSN
0040-6090

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📜 SIMILAR VOLUMES


2505. Thermal aging of Al thin films on
📂 Article 📅 1977 🏛 Elsevier Science 🌐 English ⚖ 150 KB

conduction band potential obtained from the threshold measurements shows only a small deviation from a fiat band, less than • i 0.05 eV, tip to a point 4 A, from the silicon surface. There is no indication of a large ionic charge or of a greatly reduced SiO, bandgap to within about two lattice units