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Low temperature thermal characteristics of thin-film Ni–Cr surface mount resistors

✍ Scribed by G Ventura; L Lanzi; I Peroni; A Peruzzi; G Ponti

Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
85 KB
Volume
38
Category
Article
ISSN
0011-2275

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The sputtering target for high-resistance thin film resistors plays a decisive role in temperature coefficient of resistance (TCR). Silicon-rich chromium (Cr)-silicon (Si) target was designed and smelted for high-resistance thin film resistors with low TCR. Valve metal tantalum (Ta) and aluminum (Al