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Influence of the thermal history of melts on the formation of grown-in defects in silicon

โœ Scribed by Atsushi Ikari; Koji Izunome; Soroku Kawanishi; Shinji Togawa; Kazutaka Terashima; Shigeyuki Kimura


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
270 KB
Volume
167
Category
Article
ISSN
0022-0248

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