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Influence of the temporal shape of femtosecond pulses on silicon micromachining

✍ Scribed by Gunaratne, Tissa C.; Zhu, Xin; Lozovoy, Vadim V.; Dantus, Marcos

Book ID: 121017338
Publisher: American Institute of Physics
Year: 2009
Tongue: English
Weight: 640 KB
Volume: 106
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.3253330

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