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Influence of the surrounding ambient on the reliability of the electrical characterization of thin oxide layers using an atomic force microscope

✍ Scribed by W. Hourani; B. Gautier; L. Militaru; D. Albertini; A. Descamps-Mandine; R. Arinero

Book ID: 113800552
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 717 KB
Volume: 51
Category: Article
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2011.07.035

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