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Influence of the surface treatments by multipolar plasma on the slow state tunnel kinetics at the In0.53Ga0.47As/Si3N4 interfaces

✍ Scribed by J.M. López-Villegas; A. Cornet; J.R. Morante; M. Renaud; P. Boher

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First steps of the build-up of the Si3N4

✍ J.M. Moison; F. Houzay; F. Barthe; C.A. Sébenne 📂 Article 📅 1991 🏛 Elsevier Science ⚖ 79 KB