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First steps of the build-up of the Si3N4/Ga0.47In0.53As interface by UV-induced chemical vapor deposition

✍ Scribed by J.M. Moison; F. Houzay; F. Barthe; C.A. Sébenne


Publisher
Elsevier Science
Year
1991
Weight
79 KB
Volume
251-252
Category
Article
ISSN
0167-2584

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