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Influence of the silicon nitride oxidation on the performances of NCLAD isolation

โœ Scribed by A. Tixier; V. Senez; B. Baccus; A. Marmiroli; P. Colpani; A. Rebora; G.P. Carnevale


Book ID
108362349
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
957 KB
Volume
38
Category
Article
ISSN
0026-2714

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