Influence of the polysilicon doping on the electrical quality of thin oxides: a confrontation between vertical and horizontal furnaces

✍ Scribed by G. Franco; M. Priulla; G. Renna; G. Scerra

• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 482 KB
• Volume: 4
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/s1369-8001(00)00150-5