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Influence of the Phase Composition on the Electrical Conductivity of Gas Sensors Based on Antimony-Doped Tin Dioxide Films

✍ Scribed by David E. Dyshel'


Book ID
110317108
Publisher
Springer
Year
2001
Tongue
English
Weight
956 KB
Volume
40
Category
Article
ISSN
1573-9066

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Tin dioxide films are elaborated by a chemical vapour deposition (CVD) method. An accurate control of deposition parameters (temperature, total pressure, duration) so that appropriate annealing conditions (duration, temperature) can be used to modify the structural properties of the films : grain si