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Influence of the nitrogen flow rate on the order and structure of PECVD boron nitride thin films

✍ Scribed by M. Anutgan; T. Aliyeva Anutgan; E. Ozkol; I. Atilgan; B. Katircioglu

Book ID: 116671825
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 689 KB
Volume: 355
Category: Article
ISSN: 0022-3093
DOI: 10.1016/j.jnoncrysol.2009.05.053

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