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Influence of the formation conditions on the microstructure of porous silicon layers studied by spectroscopic ellipsometry

✍ Scribed by U. Rossow; U. Frotscher; M. Thönissen; M.G. Berger; S. Frohnhoff; H. Münder; W. Richter


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
367 KB
Volume
255
Category
Article
ISSN
0040-6090

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