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Influence of the dose distribution on resist development properties

✍ Scribed by M.A. Knyazev; A.A. Svintsov; S.I. Zaitsev

Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 371 KB
Volume: 87
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2009.12.044

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