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The influence of the substrate on proximity effect and exposure dose for the inorganic resist LiF(AlF3)

✍ Scribed by Wolfram Langheinrich

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 469 KB
Volume: 27
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(94)00089-d

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