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Influence of the crystallization process on the luminescence of multilayers of SiGe nanocrystals embedded in SiO2

✍ Scribed by M. Avella; Á.C. Prieto; J. Jiménez; A. Rodríguez; J. Sangrador; T. Rodríguez; M.I. Ortiz; C. Ballesteros

Book ID
108215508
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
886 KB
Volume
147
Category
Article
ISSN
0921-5107

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## Abstract Luminescent multilayers of SiGe nanocrystals embedded in an oxide matrix have been fabricated by Low Pressure Chemical Vapour Deposition of SiGe and SiO~2~ in a single run followed by a Rapid Thermal Annealing treatment to crystallize the SiGe nanoparticles. Structural parameters like t