Stability of erbium and silver implanted
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A.R. Ramos; C. Marques; E. Alves; A.C. Marques; R.M. Almeida
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Article
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2005
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Elsevier Science
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English
⚖ 228 KB
We implanted silica-titania sol-gel films with 3 • 10 15 at./cm 2 , 180 keV Er + and 6 • 10 16 at./cm 2 , 140 keV Ag + ions. The energies were chosen so that the profiles of Ag and Er overlap. RBS and ERDA were used to study the behaviour of Ag, Er and H during the heat treatments used to densify th