Influence of substrate temperature on formation of an SiC buffer layer by reaction of Si(100) with silane-methane plasma

✍ Scribed by Bittencourt, C

• Book ID: 120827535
• Publisher: Institute of Physics
• Year: 2000
• Tongue: English
• Weight: 155 KB
• Volume: 15
• Category: Article
• ISSN: 0268-1242
• DOI: 10.1088/0268-1242/15/12/303