Influence of substitutional carbon incorporation on implanted-indium-related defects and transient enhanced diffusion

✍ Scribed by Tan, Chung Foong; Chor, Eng Fong; Liu, Jinping; Lee, Hyeokjae; Quek, Elgin; Chan, Lap

• Book ID: 120035803
• Publisher: American Institute of Physics
• Year: 2003
• Tongue: English
• Weight: 434 KB
• Volume: 83
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.1628814