Influence of Si content on the structure and internal stress of the nanocomposite TiSiN coatings deposited by large area filtered arc deposition

✍ Scribed by Cheng, Y H; Browne, T; Heckerman, B; Gannon, P; Jiang, J C; Meletis, E I; Bowman, C; Gorokhovsky, V

• Book ID: 121392749
• Publisher: Institute of Physics
• Year: 2009
• Tongue: English
• Weight: 764 KB
• Volume: 42
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/42/12/125415