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Influence of SF6 coverage on the sputtering behaviour of Cr-targets

✍ Scribed by W. Husinsky; G. Betz; B. Strehl; P. Wurz; K. Mader; K.H. Krebs


Book ID
114168055
Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
395 KB
Volume
19-20
Category
Article
ISSN
0168-583X

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