Influence of sample thickness on carrier lifetime modification induced by 4 MeV proton implantation in silicon

✍ Scribed by L.P. Biró; J. Gyulai; N.Q. Khanh; P. Tüttő

• Book ID: 113287257
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 332 KB
• Volume: 112
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(95)01228-1