Influence of quantity and energy of the particles in gas phase on nucleation of the HFCVD of diamond films

✍ Scribed by G.H. Song; C. Sun; B. Wang; A.Y. Wang; R.F. Huang; L.S. Wen

• Book ID: 117356190
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 981 KB
• Volume: 48
• Category: Article
• ISSN: 0167-577X
• DOI: 10.1016/s0167-577x(00)00271-8