## Abstract Transparent Zinc Oxide (ZnO) thin films have been grown on Si (100) and Sapphire (0001) substrates by RF magnetron sputtering for different growth time intervals (10, 30 and 60 min) to study the substrate and thickness effects. All the films have been grown at a substrate temperature of
Influence of processing variables on the structure and properties of ZnO films
โ Scribed by Gregory J. Exarhos; Shiv K. Sharma
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 701 KB
- Volume
- 270
- Category
- Article
- ISSN
- 0040-6090
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