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Influence of oxygen treatment and temperature on electrical properties of the epitaxial Nb-doped SrTiO3films on silicon

โœ Scribed by Xiang, WenFeng; Wang, ShaoMin; Zhao, Kun


Book ID
120927343
Publisher
Science in China Press (SCP)
Year
2013
Tongue
English
Weight
479 KB
Volume
56
Category
Article
ISSN
1672-1799

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## Abstract Thin films of samariumโ€oxideโ€doped (20โ€‰mol%) ceria (SDC) are grown by pulsedโ€laser deposition (PLD) on (001) MgO singleโ€crystal substrates. SrTiO~3~ (STO) prepared by PLD is used as a buffer layer on the MgO substrates to enable epitaxial growth of the fluoriteโ€structured SDC film; the