Influence of oxygen diffusion through capping layers of low work function metal gate electrodes

✍ Scribed by Bei Chen; R. Jha; H. Lazar; N. Biswas; Jaehoon Lee; Bongmook Lee; L. Wielunski; E. Garfunkel; V. Misra

• Book ID: 126720965
• Publisher: IEEE
• Year: 2006
• Tongue: English
• Weight: 154 KB
• Volume: 27
• Category: Article
• ISSN: 0741-3106
• DOI: 10.1109/LED.2006.871184