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Influence of oxygen and deposition conditions on sputtered a-Si

✍ Scribed by Tatsuo Shimizu; Minoru Kumeda; Ichiro Watanabe; Kiyohide Kamono

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Influence of deposition conditions on sp

✍ Pawlewicz, W. T. 📂 Article 📅 1978 🏛 American Institute of Physics 🌐 English ⚖ 706 KB

Influence of deposition conditions and s

✍ Živka Marinković; Rustum Roy 📂 Article 📅 1974 🏛 Elsevier Science 🌐 English ⚖ 352 KB

The effect of oxygen on film deposition

✍ Yasuo Gekka; Makio Akimoto; Tohru Kita; Yasuto Ohtani; Hiroshi Kezuka 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 293 KB

Influence of apparatus geometry and depo

✍ J. A. Thornton 📂 Article 📅 1974 🏛 AVS (American Vacuum Society) ⚖ 714 KB

Influence of sputtering conditions on H

✍ P.M. Martin; W.T. Pawlewicz 📂 Article 📅 1981 🏛 Elsevier Science 🌐 English ⚖ 664 KB

Characteristics of a-C:H:Si films deposi

✍ Martino, C. De; Demichelis, F.; Tagliaferro, A. 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 313 KB