𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Characteristics of a-C:H:Si films deposited by r.f. sputtering under various deposition conditions

✍ Scribed by Martino, C. De; Demichelis, F.; Tagliaferro, A.

Book ID
123456332
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
313 KB
Volume
3
Category
Article
ISSN
0925-9635

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Deposition temperature effects on the ch
Deposition temperature effects on the characteristics of a-Si:H deposited by pulsed DC magnetron sputtering
✍ Cherfi, R. ;Abdelmoumene, A. ;Kechouane, M. ;Rahal, A. ;Aoucher, M. ;Mohammed-Br πŸ“‚ Article πŸ“… 2009 πŸ› John Wiley and Sons 🌐 English βš– 637 KB

## Abstract In this study, the deposition temperature effects on the properties of hydrogenated amorphous silicon films are reported. The a‐Si:H thin films were deposited by DC magnetron sputtering technique, according to a new protocol of deposition. This last consists of a successively several th