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Influence of oxygen and argon on the crystal quality and piezoelectric response of AlN sputtered thin films

✍ Scribed by Vergara, L.; Clement, M.; Iborra, E.; Sanz-Hervás, A.; Garcı́a López, J.; Morilla, Y.; Sangrador, J.; Respaldiza, M.A.

No coin nor oath required. For personal study only.

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