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Influence of operating parameters on ion intensity in glow discharge mass spectrometry

✍ Scribed by Morimasa Saito


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
570 KB
Volume
274
Category
Article
ISSN
0003-2670

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✦ Synopsis


AbSbWt Usmg a VG 9000 glow discharge mass spectrometer, the Influence of sample size, sample position, sample shape, discharge current and dxharge voltage was studied m detad The ion intensity signals of elements were not influenced by the sample shape, but were influenced slgmficantly by the sample position, the sample SIX, the discharge current and the discharge voltage The maxnnum ion intensity signals of elements were obtained when the sample was 8-9 mm from the ion ent slit Keywords Mass spectrometry, Glow discharge, Ion intensity, Steels

Spark-source mass spectrometry (SSMS) IS widely used for the simultaneous determmatlon of ultra-trace elements m solid samples, semrconductor mater&, high-punty materials, etc [l-3] This method gives good accuracy (about 15%) by usmg the relative sensltlvlty factor obtamed from physical parameters without reference standards [4] However, the ion yield of this method had a wide energy spread and often gwes poor preclslon [2,3] Glow discharge mass spectrometry (GDMS) has been developed as a more stable, low-energy alternative ion source It is very sensitive for direct solid elemental analysis, exhibits a broad dynamic range and 1s relatively free from matrix effects [5-73 However, this method suffers from the usual problems accompanymg direct sohd sample analysis, namely sultablhty and avadablhty of reference materials, homogeneity concerns and sample configuration requirements


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