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Influence of nuclear energy deposition density on the ion-beam mixing of metallic bilayers

✍ Scribed by L. Thomé; J. Jagielski

Book ID
113286796
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
269 KB
Volume
106
Category
Article
ISSN
0168-583X

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✍ Eun-Hee Cirlin; Yang-Tse Cheng; Philip Ireland; Bruce Clemens 📂 Article 📅 1990 🏛 John Wiley and Sons 🌐 English ⚖ 730 KB

## Abstract To study the factors limiting the depth resolution of sputter depth profiling, we have examined the influence of ion mixing, ion beam‐induced roughness and temperature on the interface resolution of metallic bilayers consisting of Pt on top of Ni or Ti. We studied Pt/Ni and Pt/Ti interf