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Influence of negative metal ion bombardment on the properties of ITO/PET films deposited by dc magnetron sputtering

✍ Scribed by Daeil Kim

Book ID
116667459
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
599 KB
Volume
331
Category
Article
ISSN
0022-3093

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The luminescence and optoelectrical prop
The luminescence and optoelectrical properties of ITO films prepared by a sputter type negative metal ion deposition
✍ H.S. Jang; D.H. Choi; Y.S. Kim; J.H. Lee; Daeil Kim πŸ“‚ Article πŸ“… 2007 πŸ› Elsevier Science 🌐 English βš– 830 KB

Transparent conducting indium tin oxide (ITO) thin films were prepared on glass substrates by a magnetron sputter type negative ion source which requires cesium (Cs) vapor injection for surface negative ionization on the ITO target surface. Although the film was prepared at 70 Β°C, it attained high o