Influence of light on interstitial copper inp-type silicon
β Scribed by A. Belayachi; T. Heiser; J.P. Schunck; A. Kempf
- Publisher
- Springer
- Year
- 2005
- Tongue
- English
- Weight
- 479 KB
- Volume
- 80
- Category
- Article
- ISSN
- 1432-0630
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π SIMILAR VOLUMES
## Abstract The effect of vacancies induced by the prior rapid thermal processing (RTP) at 900β1200 Β°C in Ar on copper (Cu) precipitation in nβtype silicon has been investigated by means of optical microscopy and transmission electron microscopy. It was revealed that in the sample without the prior
## Abstract The growth of crystallographical pores (crysto pores) in nβtype InP and GaAs has been investigated in detail in this work. The dependence on several experimental parameters, like the substrate doping concentration __N__~D~, the etching current density __j__, nucleation, and etching time