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Influence of ion-irradiation parameters on defect formation in silicon films

✍ Scribed by Shemukhin, A. A.; Nazarov, A. V.; Balakshin, Yu. V.; Chernysh, V. S.


Book ID
125394214
Publisher
Pleiades Publishing
Year
2014
Tongue
English
Weight
326 KB
Volume
8
Category
Article
ISSN
1027-4510

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