Influence of internal energy and impact angle on the sticking behaviour of reactive radicals in thin a-C:H film growth: a molecular dynamics study

✍ Scribed by Neyts, E.; Bogaerts, A.

• Book ID: 118262286
• Publisher: Royal Society of Chemistry
• Year: 2006
• Tongue: English
• Weight: 695 KB
• Volume: 8
• Category: Article
• ISSN: 1463-9076
• DOI: 10.1039/b517563a