Influence of implantation induced damage in sapphire upon improvement of crystalline quality of silicon on sapphire

✍ Scribed by Yamamoto, Y.; Kobayashi, H.; Takahashi, T.; Inada, T.

• Book ID: 120456215
• Publisher: American Institute of Physics
• Year: 1985
• Tongue: English
• Weight: 546 KB
• Volume: 47
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.96264