Influence of He, Ne and Kr addition in reactive Ar/N2 dc magnetron plasma on TiN deposition

✍ Scribed by M. Braic; C.N. Zoita; V. Braic; A. Kiss; M. Popescu; G. Musa

• Book ID: 108390507
• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 150 KB
• Volume: 53
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(98)00419-9