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Influence of germanium incorporation on the structural and electrical properties of boron-doped ultrathin poly-Si1−xGexfilms deposited by chemical vapour deposition

✍ Scribed by Asafa, T. B.; Witvrouw, A.; Morcos, B. S.; Vanstreels, K.; Said, S. A. M.

Book ID
121602494
Publisher
Springer
Year
2013
Tongue
English
Weight
831 KB
Volume
116
Category
Article
ISSN
1432-0630

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