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Influence of gas mixing on the lateral uniformity in horizontal MOVPE reactors

✍ Scribed by I. Moerman; G. Coudenys; P. Demeester; B. Turner; J. Crawley

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 298 KB
Volume: 107
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(91)90452-b

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