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Influence of gas flow direction on DC glow-discharge deposited a-Si films

โœ Scribed by P. Kocian; G. Bugmann; D. Erni; S. Bourquard


Book ID
118332044
Publisher
Elsevier Science
Year
1983
Tongue
English
Weight
168 KB
Volume
59-60
Category
Article
ISSN
0022-3093

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