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Influence of fluids on the abrasion of silicon by diamond

✍ Scribed by Steven Danyluk; Robert Reaves


Publisher
Elsevier Science
Year
1982
Tongue
English
Weight
994 KB
Volume
77
Category
Article
ISSN
0043-1648

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Influence of silicon on the physical pro
✍ F. Demichelis; C.F. Pirri; A. Tagliaferro πŸ“‚ Article πŸ“… 1992 πŸ› Elsevier Science 🌐 English βš– 242 KB

The effect of the inclusion of silicon atoms in the network of diamond-like carbon (amorphous carbon and hydrogenated amorphous carbon) is studied. Samples of amorphous hydrogenated CSi are deposited by means of a sputter-assisted plasma chemical vapour deposition system in which a carbon target is