✦ LIBER ✦

Influence of film structure on gas barrier properties of SiOxNy films

✍ Scribed by Daisuke Yonekura; Katsuhiro Fujikawa; Ri-ichi Murakami

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Structural and Luminescent Properties of

✍ V. G. Baru; S. Bayliss; V. A. Zhitov; L. Yu. Zakharov; G. Kartopu; V. I. Pokalya 📂 Article 📅 2005 🏛 Springer 🌐 English ⚖ 129 KB

Geometric structure of thin SiOxNy films

✍ K.-M Behrens; E.-D Klinkenberg; J Finster; K.-H Meiwes-Broer 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 141 KB

Mechanical properties of SiOx gas barrie

✍ D.G. Howells; B.M. Henry; Y. Leterrier; J.-A.E. Månson; J. Madocks; H.E. Assende 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 805 KB

Effects of thickness and rf plasma oxidi

✍ S.H. Mohamed; M. Raaif 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 927 KB

Gas barrier properties of diamond-like c

✍ K. Ozeki; I. Nagashima; Y. Ohgoe; K.K. Hirakuri; H. Mukaibayashi; T. Masuzawa 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 413 KB

Properties of Evaporated SiO_2, SiOxNy,

✍ Heitmann, W. 📂 Article 📅 1971 🏛 The Optical Society 🌐 English ⚖ 577 KB