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Influence of elastic stress fields on the diffusional redistribution of impurities in silicon

✍ Scribed by V. A. Panteleev; T. S. Gugina; V. N. Leonov


Book ID
112426570
Publisher
Springer
Year
1977
Tongue
English
Weight
319 KB
Volume
20
Category
Article
ISSN
1573-9228

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