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Influence of doping on facet formation at the SiO2/Si interface

✍ Scribed by B. Gallas; J.M. Hartmann; G. Breton; J.J. Harris; J. Zhang; B.A. Joyce


Book ID
117219823
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
406 KB
Volume
440
Category
Article
ISSN
0039-6028

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