Influence of crucible and crystal rotation on oxygen-concentration distribution in large-diameter silicon single crystals

✍ Scribed by Isao Kanda; Takefumi Suzuki; Kiyoshi Kojima

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 413 KB
• Volume: 166
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(95)00494-7