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Influence of Coulomb interactions on current density distribution in a two-lens focused ion beam system

✍ Scribed by J. Bi; P.W.H. de Jager; J.E. Barth; P. Kruit

Book ID: 114155783
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 268 KB
Volume: 41-42
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(98)00057-4

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