✦ LIBER ✦
Theoretical and experimental investigations on Coulomb interactions in a two-lens focussed ion beam instrument
✍ Scribed by J. Bi; X.R. Jiang; P. Kruit
- Publisher
- Elsevier Science
- Year
- 1997
- Tongue
- English
- Weight
- 306 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0167-9317
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✦ Synopsis
The impact of Coulomb effects on the resolution of a focussed ion beam instrument is demonstrated by making use of both theoretical and experimental approaches. The calculated probe size is in reasonable agreement with the measured probe size at different operation modes of the machine. It is shown in this paper how the lens aberrations and Coulomb interactions play different roles at different magnifications and what the main problems in determining the probe size are.