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Influence of carbon material and sputtering angle on stripper foil lifetime

โœ Scribed by I. Sugai; M. Oyaizu; Y. Takeda; H. Kawakami; H. Hattori; K. Kawasaki

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
413 KB
Volume
613
Category
Article
ISSN
0168-9002

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